Applied Materials, Inc. recently secured a major technological breakthrough with the issuance of U.S. Patent No. 12735363. This patent, titled ‘Methods of making nanopowders, nanoceramic materials and nanoceramic components’, introduces advanced manufacturing techniques for engineered nanoparticles and plasma-resistant ceramic coatings. Engineers can now synthesize durable nanoceramic components designed to withstand extreme plasma environments during semiconductor fabrication.
Atomic Layer Deposition for Core-Shell Nanoparticles
The innovation focuses on producing core-shell nanoparticles where a core particle of a rare earth metal-containing oxide, fluoride, oxyfluoride, or zirconium oxide is coated with a thin film using atomic layer deposition (ALD). The core and shell materials differ to create tailored nanoparticle structures, including donut-shaped geometries with central indentations. Sintering or plasma spraying these structured nanopowders forms nanoceramic coatings and components with exceptional density, flexural strength, and dielectric performance. This process prevents particle generation and equipment erosion inside semiconductor processing chambers.
Key Technical Innovations in Nanomaterial Synthesis
Traditional protective ceramic coatings typically rely on microcrystalline structures that suffer from severe surface erosion and particle shedding under high-energy fluorine or hydrogen plasma. The technology developed by Applied Materials, Inc. addresses this limitation by applying non-line-of-sight atomic layer deposition directly onto nanoscale core particles ranging from 5 to 100 nanometers. By depositing ultra-thin conformal films of 1 to 500 nanometers, the method creates composite nanoparticles without causing unwanted agglomeration into larger micro-scale grains. Furthermore, the specialized donut-shaped morphology improves powder flow, enhances melting consistency during plasma spraying, and minimizes porosity in the finished ceramic material.
Recognition as Patent of the Month for October 2026
This patent was recognized as Patent of the Month for October 2026 in the biotech-chemical-nano sector due to its transformative impact on advanced materials chemistry and nanotechnology. By controlling nanoparticle stoichiometry at the atomic level, such as balancing 60 to 70 mole percent yttrium oxide with 30 to 40 mole percent zirconium oxide, the engineering team at Applied Materials, Inc. achieved unprecedented mechanical and electrical properties. The resulting nanoceramics display flexural strengths between 170 and 250 MPa, elevated fracture toughness, and superior plasma erosion resistance, setting a high standard for semiconductor chamber component fabrication.
U.S. R&D Tax Credit Eligibility for Practical Applications
Companies implementing or adapting the manufacturing processes disclosed in U.S. Patent No. 12735363 may qualify for the U.S. Federal Research and Development (R&D) Tax Credit under Internal Revenue Code Section 41. Eligible research activities include experimenting with atomic layer deposition parameters on core powders, developing precursor gas combinations for rare earth metal coatings, and optimizing sintering thermal profiles to maintain nanocrystalline grain boundaries. Expenses incurred during the systematic trial and error required to resolve technical uncertainties regarding coating adherence, particle morphology, and structural density, including engineering wages, experimental materials, and laboratory testing costs, represent qualified research expenditures under the federal four-part test.
